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产品名称：四氟化碳（R14），又名四氟甲烷、全氟甲烷

分子式：CF4

CAS登录号：75-73-0

理 化 特 性：

外观与性状：无色气体

分子量：  88.004                     

熔点/凝固点（℃）：-183.6

相对密度（水=1）：1.302             

沸点、初沸点和沸程（℃）：-127.8

临界压力（MPa）：3.74                

临界温度（℃）：-45.65

临界体积（cm3/mol）:140             

临界密度（g/cm3）:0.6286

相对蒸汽密度（空气=1）：3.039        

辛醇/水分配系数：1.18

-128℃时饱和蒸汽压（kpa）：101.325

破坏臭氧潜能值（ODP）：0

溶解性：微溶于水，溶于苯和氯仿

燃爆危险：本品不燃。

产品用途：

主要用于各种集成电路的等离子刻蚀工艺，也用作激光气体、低温制冷剂、溶剂、润滑剂、绝缘材料、红外检波管的冷却剂。

四氟化碳是微电子工业中用量最大的等离子蚀刻气体，四氟甲烷高纯气及四氟甲烷高纯气、高纯氧的混合气，可广泛应用于硅、二氧化硅、氮化硅、磷硅玻璃及钨等薄膜材料的蚀刻，在电子器件表面清洗、太阳能电池生产、激光技术、低温制冷、泄漏检验、印刷电路生产中的去污剂等方面也大量使用。 

用作低温制冷剂及集成电路的等离子干法蚀刻技术。

包装规格：

可循环使用钢瓶：47L。

储存运输：

R14钢瓶为带压容器，储存时应远离火种、热源、避免阳光直接曝晒，通常储放于阴凉、干燥和通风的仓库内；搬运时应轻装、轻卸，防止钢瓶以及阀门等附件破损。

Product Name: Carbon Tetrafluoride (R14), also known as Tetrafluoromethane, Perfluoromethane

Molecular Formula: CF₄

CAS No.: 75-73-0

Physical and Chemical Properties

Appearance and Physical State: Colorless gas

Molecular Weight: 88.004

Melting Point / Freezing Point (℃): -183.6

Relative Density (water=1): 1.302

Boiling Point, Initial Boiling Point and Boiling Range (℃): -127.8

Critical Pressure (MPa): 3.74

Critical Temperature (℃): -45.65

Critical Volume (cm³/mol): 140

Critical Density (g/cm³): 0.6286

Relative Vapor Density (air=1): 3.039

Octanol-Water Partition Coefficient: 1.18

Saturated Vapor Pressure at -128℃ (kPa): 101.325

Ozone Depletion Potential (ODP): 0

Solubility: Slightly soluble in water, soluble in benzene and chloroform

Fire and Explosion Hazard: Non-flammable.

Product Application 

It is mainly used for plasma etching processes of various integrated circuits. It is also applied as laser gas, low-temperature refrigerant, solvent, lubricant, insulating material and coolant for infrared detector tubes.

Carbon tetrafluoride is the most widely used plasma etching gas in the microelectronics industry. High-purity tetrafluoromethane and its mixture with high-purity oxygen are widely used for etching thin-film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass and tungsten. It is also extensively applied in electronic component surface cleaning, solar cell production, laser technology, low-temperature refrigeration, leakage detection, and detergents for printed circuit manufacturing.

It serves as a low-temperature refrigerant and for plasma dry etching technology of integrated circuits.

Packaging Specifications 

Recyclable steel cylinder: 47L.

Storage and Transportation 

R14 cylinders are pressure vessels. Keep away from fire and heat sources, and avoid direct sunlight during storage. Normally store in a cool, dry and well-ventilated warehouse. Handle with care during loading, unloading and transportation to prevent damage to cylinders, valves and other accessories.